This is high-end equipment for the preparation of ultra-high precision optoelectronic devices. Focusing on high-quality optical coating, it has extremely low scattering value and defect density. Suitable for high-precision coating production in demanding applications such as laser, optical communication, aerospace, biomedical, automotive optics, MEMS sensors, and pan semiconductors.
Blue glass & white glass IR- CUT, blue glass & white glass AR, resin lens AR, periscope right angle prism, etc.
- Real-time online monitor
- RISE RF ion source: ion beam current is precise and controllable, with long continuous working time, suitable for various working gases, and pollution-free to the film layer.
- Unique plasma source: radio frequency drive, consumable-free operation, providing pure oxygen ions, ensuring excellent spectral indicators in specific bands.
- Light controlled: Light controlled film forming control accuracy: 0.1-0.3%, with a unique structure and efficient optical path design, real-time collection of ultra-high-speed spectral data, and independently developed intelligent light-controlled core algorithm.
- Innovative control system: Open modular system architecture, a smart control system based on ARM, friendly human-machine interaction experience, supporting IoT and cloud computing architecture.
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OPIE1550 |
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SUS304, φ1550mmx1600mm(H) |
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4 molecular pumps +1 set of mechanical pump/ roots pump unit |
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workpiece disc diameter 1460mm, rotary speed 0-30 rpm |
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2 Sets of electronic guns (dual guns, dual scanning, dual filaments, 270-degree beam deviation angle, power 10KW) |
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RISE radio frequency ion source + special plasma source (optional) |
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Optical thin film real-time monitoring system |
self-developed optical control system (wide spectrum, single wavelength) optional |
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compressor power 10KW, coil cooling temperature<-130°C |
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